Method for modulating light

摘要: Light is modulated using an array of modulation elements formed on a semiconductor substrate, and control circuitry connected to the for controlling each independently, having surface which caused exhibit predetermined impedance characteristic particular frequencies light. Each element has deformable portion held under tensile stress, controls deformation portion. The are made by forming sandwich two layers sacrificial layer between them, thickness related final cavity dimension, water or oxygen based plasma remove layer.