0.4 μm spatial resolution with 1 GHz (λ=30 cm) evanescent microwave probe
作者： M. Tabib-Azar , D.-P. Su , A. Pohar , S. R. LeClair , G. Ponchak
DOI: 10.1063/1.1149658
关键词:
摘要: In this article we describe evanescent field imaging of material nonuniformities with a record resolution 0.4 μm at 1 GHz (λg/750 000), using resonant stripline scanning microwave probe. A chemically etched tip is used as point-like emitter and probe–sample distance modulation employed to improve the signal-to-noise ratio. Images obtained by probe, optical microscope, tunneling microscope are presented for comparison. Probe was calibrated perform quantitative conductivity measurements. The principal factors affecting ultimate probe also discussed.
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