Development of 3-D focused-ion-beam (FIB) etching methods for nano- and micro-technology application

摘要: We have developed a 3-D FIB etching method for making micro-devices and sensors based on nano- micro-technology. fabricated single electron tunneling (SET) devices Bi-2201 crystal whisker. also describe methods using layered whiskers as examples. These offer simple in situ evaporation processes systems micro area of stacks.