Epitaxial electro-optical BaTiO3 films by single-sourcemetal–organic chemical vapour deposition

作者: Jing Zhao , Vladimir Fuflyigin , Feiling Wang , Peter E. Norris , Lionel Bouthilette

DOI: 10.1039/A607898B

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摘要: Chemical vapour deposition (CVD) is a promising process for the production of ferroelectric complex oxide films having large electro-optical coefficient. We report the epitaxial growth of high-quality BaTiO 3 using single-source CVD process. A variety relationships have been achieved with BaTiO grown cube-on-cube on substrates large lattice mismatched LaAlO and MgO, «001», «110» and «111» oriented SrTiO . A quadratic electro-optic coefficient was measured CVD-prepared 3 films. These also values optic refractive indices and second electro-optic susceptibilities close to those bulk BaTiO crystals, indicating their excellent quality.

参考文章(6)
C. S. Chern, J. Zhao, L. Luo, P. Lu, Y. Q. Li, P. Norris, B. Kear, F. Cosandey, C. J. Maggiore, B. Gallois, B. J. Wilkens, Epitaxial growth of BaTiO3 thin films by plasma‐enhanced metalorganic chemical vapor deposition Applied Physics Letters. ,vol. 60, pp. 1144- 1146 ,(1992) , 10.1063/1.106433
G. M. Davis, M. C. Gower, Epitaxial growth of thin films of BaTiO3using excimer laser ablation Applied Physics Letters. ,vol. 55, pp. 112- 114 ,(1989) , 10.1063/1.102393
K. Fujimoto, Y. Kobayashi, K. Kubota, Growth of BaTiO3SrTiO3 thin films by r.f. magnetron sputtering Thin Solid Films. ,vol. 169, pp. 249- 256 ,(1989) , 10.1016/0040-6090(89)90708-6
L. A. Wills, B. W. Wessels, D. S. Richeson, T. J. Marks, Epitaxial growth of BaTiO3 thin films by organometallic chemical vapor deposition Applied Physics Letters. ,vol. 60, pp. 41- 43 ,(1992) , 10.1063/1.107359
Jiming Zhang, Robin A. Gardiner, Peter S. Kirlin, Robert W. Boerstler, John Steinbeck, Single liquid source plasma‐enhanced metalorganic chemical vapor deposition of high‐quality YBa2Cu3O7−x thin films Applied Physics Letters. ,vol. 61, pp. 2884- 2886 ,(1992) , 10.1063/1.108065
H. A. Lu, L. A. Wills, B. W. Wessels, W. P. Lin, T. G. Zhang, G. K. Wong, D. A. Neumayer, T. J. Marks, Second-harmonic generation of poled BaTiO3 thin films Applied Physics Letters. ,vol. 62, pp. 1314- 1316 ,(1993) , 10.1063/1.108716