Lorentz force based magnetic field sensor with optical readout
作者： Franz Keplinger , Samuel Kvasnica , Artur Jachimowicz , Franz Kohl , Johannes Steurer
DOI: 10.1016/J.SNA.2003.10.025
关键词:
摘要: Abstract A miniaturized sensor capable for measuring high magnetic flux densities is presented. The density converted into a movement of micro machined U-shaped cantilever, which bears thin film lead. cantilever accomplished by the Lorentz force acting on electrical current. poses as deflecting mirror in an optical readout system. ratio intensity light reflected front side to incident analyzed. conversion principle was proven experimentally. It well described near field model. To overcome measurement problems caused deformation due mechanically prestressed cantilevers, ac excitation used characterization. range current–flux product 2.2 mA T achieved evaluating peak intensity. Beyond this limit more sophisticated signal analysis has be applied. Depending rest position, about 10 mT can resolved with current 10 mA. target upper 50 T reducing
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