Method of fabricating substrate where patterns are formed

摘要: Provided is a method of fabricating substrate where patterns are formed, the including: preparing solution in which plurality oxide beads dispersed; forming on substrate; installing provisional structure an upper portion so that micro-channel formed injecting dispersed, into and fixing at thermally processing substrate. A low-priced can be patterned to have desired shape damages prevented from occurring during dry etching, etching process not performed yield device reduced mass production increases. In addition, high-priced equipment for needed economical high productivity large quantities substrates fabricated within short time achieved.