摘要: Rare earth (R) iron garnets (R3Fe5O12) have excellent properties for magnetic, magneto-optic and microwave applications. For magnetic bubble memory devices requiring single crystal films of several micrometer thickness an epitaxial technique had to be developed. The know-how concerning congruently melting non-magnetic garnet growth from the melt laser applications was used grow gallium gadolinium as suitable substrate crystals. On wafers these crystals layers can grown by liquid phase epitaxy (LPE) very diluted high temperature solutions known flux yttrium (YIG) Substrate with structure having a lattice constant in range 1.22 nm 1.26 are now available [1]. This allows wide variety compositions tailor various LPE is well suited process study phenomena, too. Some advantageous features respect will discussed. Occasionally comparison semiconductors made.
springer.com
springerlink.com参考文章(33)
C.-P. Klages, W. Tolksdorf, G. Kumpat, The influence of excess iron oxide on the solubility of yttrium iron garnet and its growth kinetics on (111) substrates Journal of Crystal Growth. ,vol. 65, pp. 556- 561 ,(1983) , 10.1016/0022-0248(83)90102-1
Taketoshi Hibiya, Yukio Morishige, Junichiro Nakashima, Growth and Characterization of Liquid-Phase Epitaxial Bi-Substituted Iron Garnet Films for Magneto-Optic Application Japanese Journal of Applied Physics. ,vol. 24, pp. 1316- 1319 ,(1985) , 10.1143/JJAP.24.1316
W. Tolksdorf, H. Dammann, E. Pross, B. Strocka, H.J. Tolle, P. Willich, Growth of Yttrium iron garnet multi-layers by liquid phase epitaxy for single mode magneto-optic waveguides Journal of Crystal Growth. ,vol. 83, pp. 15- 22 ,(1987) , 10.1016/0022-0248(87)90497-0
Claus-Peter Klages, Site selectivity in praseodymium- and bismuth-substituted gadolinium gallium garnet epilayers Materials Research Bulletin. ,vol. 19, pp. 633- 642 ,(1984) , 10.1016/0025-5408(84)90131-4
W. van Erk, A solubility model for rare-earth iron garnets in a PbO/B2O3 solution Journal of Crystal Growth. ,vol. 46, pp. 539- 550 ,(1979) , 10.1016/0022-0248(79)90043-5
H.D. Jonker, Investigation of the phase diagram of the system PbO-B2O3-Fe2O3-Y2O3 for the growth of single crystals of Y3Fe5O12 Journal of Crystal Growth. ,vol. 28, pp. 231- 239 ,(1975) , 10.1016/0022-0248(75)90239-0
K. Fischer, D. Linzen, E. Sinn, S. Bornmann, Equilibrium Reactions in Oxidic High Temperature Solutions Used for Liquid Phase Epitaxy of Garnets Journal of Crystal Growth. ,vol. 52, pp. 729- 733 ,(1981) , 10.1016/0022-0248(81)90369-9
E. Sinn, D. Linzen, K. Fischer, The importance of the oxygen ion concentration for oxidic high-temperature solvents Crystal Research and Technology. ,vol. 20, pp. 965- 971 ,(1985) , 10.1002/CRAT.2170200721
R. Ghez, E.A. Giess, The temperature dependence of garnet liquid phase epitaxial growth kinetics Journal of Crystal Growth. ,vol. 27, pp. 221- 226 ,(1974) , 10.1016/S0022-0248(74)80067-9
W. Tolksdorf, I. Bartels, Facet formation of yttrium iron garnet layers grown epitaxially on spheres Journal of Crystal Growth. ,vol. 54, pp. 417- 424 ,(1981) , 10.1016/0022-0248(81)90493-0