A differential laser Doppler system for one-dimensional in-plane motion measurement of MEMS

作者: Ying Zhong , Guoxiong Zhang , Changlin Leng , Tao Zhang

DOI: 10.1016/J.MEASUREMENT.2006.07.006

关键词:

摘要: … The differential laser Doppler technique is used to measure one-dimensional in-plane … The repeatability of displacement measurements is 0.9 μm. Compared with computer micro-…

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