The use of high aspect ratio photoresist (SU-8) for super-hydrophobic pattern prototyping

作者: Neil J Shirtcliffe , Sanaa Aqil , Carl Evans , Glen McHale , Michael I Newton

DOI: 10.1088/0960-1317/14/10/013

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摘要: In this work we present a reliable technique for the production of large areas of high aspect-ratio patterns and describe their use as model super-hydrophobic systems. The high …

参考文章(36)
Kiyoharu Tadanaga, Junichi Morinaga, Tsutomu Minami, Formation of Superhydrophobic-Superhydrophilic Pattern on Flowerlike Alumina Thin Film by the Sol-Gel Method Journal of Sol-Gel Science and Technology. ,vol. 19, pp. 211- 214 ,(2000) , 10.1023/A:1008732204421
Kiyoharu Tadanaga, Kaori Kitamuro, Atsunori Matsuda, Tsutomu Minami, Formation of Superhydrophobic Alumina Coating Films with High Transparency on Polymer Substrates by the Sol-Gel Method Journal of Sol-Gel Science and Technology. ,vol. 26, pp. 705- 708 ,(2003) , 10.1023/A:1020785818687
Kenji Suzuki, Yurika Uyeda, Load-carrying capacity and friction characteristics of a water droplet on hydrophobic surfaces Tribology Letters. ,vol. 15, pp. 77- 82 ,(2003) , 10.1023/A:1024492713010
T. Onda, S. Shibuichi, N. Satoh, K. Tsujii, Super-Water-Repellent Fractal Surfaces Langmuir. ,vol. 12, pp. 2125- 2127 ,(1996) , 10.1021/LA950418O
M. McNie, D. King, C. Vizard, A. Holmes, K. W. Lee, High aspect ratio micromachining (HARM) technologies for microinertial devices Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems. ,vol. 6, pp. 184- 188 ,(2000) , 10.1007/S005420000044
Didem Öner, Thomas J. McCarthy, Ultrahydrophobic Surfaces. Effects of Topography Length Scales on Wettability Langmuir. ,vol. 220, pp. 7777- 7782 ,(2000) , 10.1021/LA000598O
Robert N. Wenzel, RESISTANCE OF SOLID SURFACES TO WETTING BY WATER Industrial & Engineering Chemistry. ,vol. 28, pp. 988- 994 ,(1936) , 10.1021/IE50320A024
Satoshi Shibuichi, Tomohiro Onda, Naoki Satoh, Kaoru Tsujii, Super Water-Repellent Surfaces Resulting from Fractal Structure The Journal of Physical Chemistry. ,vol. 100, pp. 19512- 19517 ,(1996) , 10.1021/JP9616728
David Quéré, Rough ideas on wetting Physica A-statistical Mechanics and Its Applications. ,vol. 313, pp. 32- 46 ,(2002) , 10.1016/S0378-4371(02)01033-6
Akira Kawai, Hitoshi Nagata, Wetting Behavior of Liquid on Geometrical Rough Surface Formed by Photolithography Japanese Journal of Applied Physics. ,vol. 33, pp. L1283- L1285 ,(1994) , 10.1143/JJAP.33.L1283