Improving the spatial resolution of a magnetic force microscope tip via focused ion beam modification and magnetic film coating
作者： H.S. Huang , M.W. Lin , Y.C. Sun , L.J. Lin
DOI: 10.1016/J.SCRIPTAMAT.2006.11.014
关键词:
摘要: To fabricate high-resolution magnetic tips by a more convenient method, this study applied focused ion beam milling and film coating techniques to manufacture high aspect ratio (HAR) force microscope (MFM) tips. The results showed that HAR MFM tip with of 10:1 was successfully fabricated. measurements demonstrated probe provided clear images. ultimate lateral resolution the reduced minimum 20 nm.
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