Excimer laser oscillation apparatus
作者： Nobuyoshi Tanaka , Tadahiro Ohmi
DOI:
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摘要: An excimer laser oscillation apparatus comprises a chamber for storing gas, pair of electrodes arranged in the chamber, and voltage application circuit applying to excite gas. A fluorine passivation film is formed on an inner surface said chamber. The further has flow current that exceeds light-emission threshold value between while alternately changing flowing direction thereof. And, have oxygen content not more than 10 ppm.
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