Solid immersion microscopy system with deformable mirror for correction of aberrations

摘要: A system and method for correction of aberrations in a solid immersion microscopy using deformable mirror. lens is provided having surface configured to make optical contact with nearly planar substrate, an object be imaged disposed on the opposite side substrate. convex faces objective lens. mirror assembly, including plurality individually controllable actuators, receives light transmitted from object. control controls communication assembly provides individual actuation each actuators compensate or counteract effects aberrations.