Short Wavelength Imaging Characteristics Of Figured Multilayer Mirrors

摘要: At short wavelengths (λ - 5nm) a highly reflecting multilayer must consist of large number layers, in which the layer interfaces are sharply defined and strongly absorbing (metal) component layers as thin possible. The mininum thickness microcrystalline metal is apparently set by unit cell dimensions, lateral dimensions each microcrystallite, deposition conditions nature metal. influence these parameters described related to fabrication wavelength mirrors.