Cascade source and a method for controlling the cascade source
作者： Franciscus Cornelius Dings , Remco Leonardus Johannes Robertus Pennings , Leonardus Peterus Maria Clijsen , Martin Dinant Bijker
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摘要: A cascade source provided with a cathode housing, number of plates insulated from each other and stacked on top which together bound at least one plasma channel, an anode plate outflow opening connecting to the wherein is per comprises electrode adjustable relative housing in direction clamping provision preferably collet chuck type. Also described method for controlling use.
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