作者: Kamimura Tetsuya
DOI:
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摘要: The present invention provides a filter wherein it is possible to manufacture chemical solution that excellent in preventing defects. In addition, manufacturing method, filtering device, and method are provided. according the used for contains body at least type of one organic compound selected from group consisting of: compounds represented by general formulas (I) (V); alkanes formula (X); alkenes (XI) (XII). total content first 0.10 10,000 ppt mass with respect filter.