Predicting the Material Removal in Polishing: The Applicability of Two Types of Statistical Models
作者： X. L. Jin , L. C. Zhang
DOI: 10.1080/10910344.2014.897838
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摘要: This article develops two statistical rough surface models to investigate the material removal rate in polishing. Model I implies that contact between surfaces is equivalent a composite and plane; but II without concept. The prediction differences of were first investigated with aid mechanics. analysis shows relative error predictions by could be minimized considering interactions asperities, this increases separation mean planes, decreases asperity density, radius standard deviation height. By extending study polishing, it was found interaction an important factor modelling given reference planes pad workpiece surfaces, in...
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