Scalable fabrication of SnO2 thin films sensitized with CuO islands for enhanced H2S gas sensing performance

摘要: Abstract The detection of H 2 S, an important gaseous molecule that has been recently marked as a highly toxic environmental pollutant, attracted increasing attention. We fabricate wafer-scale SnO thin film sensitized with CuO islands using microelectronic technology for the improved S gas. –CuO island sensor exhibits significantly enhanced gas response and reduced operating temperature. thickness strongly influences sensing characteristics, highest is observed 20 nm-thick islands. value ( R /R g ) to 5 ppm high 128 at 200 °C increases nearly 55-fold compared bare sensor. Meanwhile, (250 ppm), NH 3 CO LPG (1000 ppm) are low (1.3–2.5). selectivity explained by sensitizing effect extension electron depletion regions because formation p–n junctions.