Parameter identification of an electrically actuated imperfect microbeam

摘要: Abstract In this study we consider a microelectromechanical system (MEMS) and focus on extracting analytically the model parameters that describe its non-linear dynamic features accurately. The device consists of clamped-clamped polysilicon microbeam electrostatically electrodynamically actuated. has imperfections in geometry, which are related to microfabrication process, resulting many unknown uncertain device. objective present paper is introduce simple but appropriate which, despite inevitable approximations, able predict most relevant aspects experimental response neighborhood first symmetric resonance. modeling includes main microstructure. settled via parametric identification. approach developed frequency domain based matching both values and, remarkably, curves, considered as salient response. Non-linearities considerably complicate identification process. Via combined use linear analysis simulations, single mode reduced-order derived. Extensive numerical simulations performed at increasing electrodynamic excitation. Comparison with data shows satisfactory concurrence results not only low voltage, also higher ones. This validates proposed theoretical approach. We highlight applicability, similar case-studies more general, systems.