A study of the charging and dissociation of SiO2 Surfaces by AES
作者： B Carrière , B Lang
DOI: 10.1016/0039-6028(77)90267-9
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摘要: Abstract AES is used to determine the initial spectrum of a vacuum-broken SiO 2 surface and follow its dissociation under electron beam probe. Both Auger peaks heights energies are affected by irradiation. The change in stoichiometry accompanied decrease charge 5–8 V. relation between explained influence radiation-induced defects on secondary emission. reduction characterized terms irradiation dose, cross-section impact efficiency. Resistance radiation damage increased carbon contamination. chemical contribution peak energy can be distinguished from charging effect leading shift element compound 12 eV for silicon peak.
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Kenneth G. Mckay, Secondary Electron Emission Advances in Electronics and Electron Physics Volume 1. ,vol. 1, pp. 65- 130 ,(1948) , 10.1016/S0065-2539(08)61101-4
R.E. Kirby, D. Lichtman, Electron beam induced effects on gas adsorption utilizing auger electron spectroscopy: Co and O2 on Si: I. Adsorption studies Surface Science. ,vol. 41, pp. 447- 466 ,(1974) , 10.1016/0039-6028(74)90061-2
H. Tokutaka, M. Prutton, I.G. Higginbotham, T.E. Gallon, The (100) surfaces of alkali halides. II. Electron stimulated dissociation Surface Science. ,vol. 21, pp. 233- 240 ,(1970) , 10.1016/0039-6028(70)90230-X
E. H. S. Burhop, The Auger Effect and Other Radiationless Transitions ,(1980)
G. Hochstrasser, J.F. Antonini, Surface states of pristine silica surfaces: I. ESR studies of Es′ dangling bonds and of CO2− adsorbed radicals Surface Science. ,vol. 32, pp. 644- 664 ,(1972) , 10.1016/0039-6028(72)90192-6
Chuan C. Chang, Auger electron spectroscopy Surface Science. ,vol. 25, pp. 53- 79 ,(1971) , 10.1016/0039-6028(71)90210-X
J.E. Rowe, H. Ibach, H. Froitzheim, Photoemission and energy loss spectroscopy on semiconductor surfaces Surface Science. ,vol. 48, pp. 44- 58 ,(1975) , 10.1016/0039-6028(75)90309-X
George W. Arnold, W. Dale Compton, Radiation Effects in Silica at Low Temperatures Physical Review. ,vol. 116, pp. 802- 811 ,(1959) , 10.1103/PHYSREV.116.802
Wayne E. Morgan, John R. Van Wazer, Binding energy shifts in the x-ray photoelectron spectra of a series of related Group IVa compounds The Journal of Physical Chemistry. ,vol. 77, pp. 964- 969 ,(1973) , 10.1021/J100626A023
I. Jánossy, M. Menyhárd, LEED study of quartz crystals Surface Science. ,vol. 25, pp. 647- 649 ,(1971) , 10.1016/0039-6028(71)90152-X