Diffractive shaping of excimer laser beams
作者： J. Turunen , P. Pääkkönen , M. Kuittinen , P. Laakkonen , J. Simonen
DOI: 10.1080/09500340008230526
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摘要: Abstract We address the problem of shaping intensity distribution a highly directional partially coherent field, such as an excimer laser beam, by means diffractive optics. Our theoretical analysis is based on modelling multi-transverse-mode beam Gaussian Schell-model beam. It shown numerically that periodic element, which unsuitable for works well with because its partial spatial coherence. The conversion approximately into flat-top in Fourier plane lens demonstrated shaper fabricated multilevel profile SiOl electron-beam lithography and proportional reactive-ion etching.
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