Systems And Methods For Detecting Alignment Errors
作者： Theodore F. Cyman , Travis J. Galoppo , John R. Soltysiak , Anthony V. Moscato , Brett Rimes
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摘要: A method of detecting an alignment error includes the steps controlling a first portion one or more imaging units to image on substrate plurality substantially parallel lines extending along direction and second third fourth direction. One distances between adjacent are varied varied. Further, imaged by portions form pattern. The further collecting data relating pattern analyzing collected determine units.
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