作者: Barry W. Robole , Christopher R. Kokaisel , Peter D. Ludowise , William Bedingham , Jeffrey C. Pederson
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摘要: Systems and methods for processing sample devices. The system can include a base plate adapted to rotate about rotation axis. at least one first magnetic element. further an annular cover, device comprising thermal process chamber. cover inner edge, outer second method positioning the between such that edge of is positioned inwardly chamber, element attracts force in direction along z-axis, urging into contact with plate.