Free-space-wiring fabrication in nano-space by focused-ion-beam chemical vapor deposition

摘要: Focused-ion-beam chemical vapor deposition (FIB-CVD) is an excellent technology for forming three-dimensional nanostructures. Various diamond-like-carbon (DLC) free-space-wirings have been demonstrated by FIB-CVD using a computer-controlled pattern generator, which commercially available generator electron-beam (EB) lithography. The material composition and crystal structure of DLC free-space-wiring were studied transmission-electron microscopy energy-dispersive x-ray spectroscopy. As result, it became clear that amorphous carbon containing Ga core in the wire. Furthermore, electrical resistivity measurement was carried out two terminal electrodes. Au electrodes fabricated EB lithography lift-off process. about 100 Ω cm at room temperature.