Plasma characterization during laser ablation of graphite in nitrogen for the growth of fullerene-like CNx films

摘要: Chemistry, energy, and spatial distributions of species in carbon–nitrogen plasma plumes were investigated to define conditions for growth carbon nitride CNx films with a fullerene-like structure. Plumes generated by ablation graphite using 248 nm excimer laser the presence low-pressure nitrogen. The element specific imaging, time-of-flight experiments, fluorescence spectroscopy, molecular vibration sequence analyses. Studies showed importance plume/substrate interaction causing secondary excitation phenomena. For N2 pressures within 5–50 mTorr range, plasmas at substrate vicinity found consist mostly atomic carbon, CN C2 molecules. Kinetic energies calculated 10–20 eV mono 30–55 CN, 20–40 C2. Excited molecules collisions plume surface. Their vibrational strongly influenced by...