Solid state diffusion of antimony in germanium, from the vapour phase, in a vacuum furnace
作者： G.N. Wills
DOI: 10.1016/0038-1101(67)90107-4
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摘要: Abstract The diffusion of antimony into germanium in a two zone vacuum furnace has been investigated by 4-point probe technique. Graphs are given the variation concentration on surface with temperature and time, also that depth diffused p-n junction. Simple analyses profiles concentrations below 1 × 1018 atoms cm−3 gave constant D0 507 cm2 sec−1 an activation energy 2·8 eV. Further accurately determined profiles, show anomalous behaviour 5 1017 cm−3.
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