Sensor for biomolecules
作者： Lidija Sekaric , Tak H. Ning , Marwan H. Khater , Sufi Zafar
DOI:
关键词:
摘要: A sensor for biomolecules includes a silicon fin comprising undoped silicon; source region adjacent to the fin, heavily doped drain of doping type that is same as region; and layer gate dielectric covering an exterior portion between region, plurality antibodies, antibodies configured bind with biomolecules, such current flowing varies when antibodies.
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