O. Oralkan, A.S. Ergun, J.A. Johnson, M. Karaman, U. Demirci, K. Kaviani, T.H. Lee, B.T. Khuri-Yakub,
Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging? IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control. ,vol. 49, pp. 1596- 1610 ,(2002) ,
10.1109/TUFFC.2002.1049742