Nano-mechanical properties of BCN/CN/BN multilayer films
作者： C. Morant , D. Cáceres , J.M. Sanz , E. Elizalde
DOI: 10.1016/J.DIAMOND.2006.09.024
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摘要: Abstract Hard coatings based on BCN/CN/BN multilayer films were deposited Si substrates using a double ion beam sputtering system. The multilayers obtained by sequential of BN, C and B4C targets simultaneous bombardment the growing with low energy nitrogen ions. characterized Auger electron spectroscopy (AES) depth profiles in order to get quantitative analysis components different layers. In interface BCN/CN, Factor Analysis was used deconvolute chemical states evaluate physical characteristics respect their practical applications. this work, we have studied composition, morphology, hardness wear resistance films. mean grain size structures coatings, as well root square (RMS) surface roughness, measured AFM.
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