Interdigital cantilevers for atomic force microscopy
作者： S. R. Manalis , S. C. Minne , A. Atalar , C. F. Quate
DOI: 10.1063/1.117578
关键词:
摘要: … In this letter, we present a new interferometric sensor for the … parable to the interferometric sensors described previously. … reference plane in the fabrication process such that maximum …
core.ac.uk
scitation.org
harvard.edu
aip.org
sci-hub.se 参考文章(2)
Max Born, Emil Wolf, Principles of Optics ,(1959)
D. I. R. Sander, W. Schrepp, P. Hössel, Scanning force microscopy Cosmetics and toiletries. ,vol. 111, pp. 57- 65 ,(1996)