Stable high brightness radio frequency driven micro-discharge lamps at 193 (ArF*) and 157 nm ( F2* )
作者： M Salvermoser , D E Murnick
DOI: 10.1088/0022-3727/37/2/006
关键词:
摘要: A stable discharge between two pin electrodes separated by several hundred micrometres in a high pressure rare gas (~900 mbar) halogen (~1 mbar) mixture is shown to yield continuous wave (CW) ultra violet (UV) and vacuum UV light sources. Lamps operating at 193 (ArF*) 157 nm ( ) have been demonstrated. Total CW output power the was measured be 30 for ArF* 20 mW . The brightness of sources estimated order W cm−2 sr−1. With direct current excitation, electrode lifetimes are limited few minutes due fluorine salt deposits. However, using radio frequency (RF) field drive discharge, lifetime lamps increased hundreds hours. one-dimensional model RF micro-discharge explaining increase presented. technology described can adapted many other wavelengths promises even higher powers future.
harvard.edu
sci-hub.se 参考文章(20)
Kaare J. Nygaard, Scott R. Hunter, John Fletcher, Stephen R. Foltyn, Electron attachment in dilute fluorine‐helium mixtures Applied Physics Letters. ,vol. 32, pp. 351- 353 ,(1978) , 10.1063/1.90055
D. K. Bohme, D. B. Dunkin, F. C. Fehsenfeld, E. E. Ferguson, Flowing Afterglow Studies of Ion–Molecule Association Reactions The Journal of Chemical Physics. ,vol. 51, pp. 863- 872 ,(1969) , 10.1063/1.1672150
M. Salvermoser, D. E. Murnick, J. Wieser, A. Ulrich, Energy flow and excimer yields in continuous wave rare gas–halogen systems Journal of Applied Physics. ,vol. 88, pp. 453- 459 ,(2000) , 10.1063/1.373680
D.C. Lorents, The physics of electron beam excited rare gases at high densities Physica B-condensed Matter. ,vol. 82, pp. 19- 26 ,(1976) , 10.1016/0378-4363(76)90265-5
O. Judd, Electron‐collisional excited‐state kinetics in argon and mercury electrical discharges Journal of Applied Physics. ,vol. 47, pp. 5297- 5303 ,(1976) , 10.1063/1.322606
M. R. Flannery, T. P. Yang, Ionic recombination of rare‐gas atomic ionsX+with F−in a dense‐gasX Applied Physics Letters. ,vol. 32, pp. 327- 329 ,(1978) , 10.1063/1.90038
M. Salvermoser, A. Ulrich, J. Wieser, Heavy-ion-beam-induced laser scheme in hydrogenlike He + Physical Review E. ,vol. 58, pp. 6531- 6538 ,(1998) , 10.1103/PHYSREVE.58.6531
D. K. Bohme, N. G. Adams, M. Mosesman, D. B. Dunkin, E. E. Ferguson, Flowing Afterglow Studies of the Reactions of the Rare‐Gas Molecular Ions He2+, Ne2+, and Ar2+ with Molecules and Rare‐Gas Atoms The Journal of Chemical Physics. ,vol. 52, pp. 5094- 5101 ,(1970) , 10.1063/1.1672747
Ahmed El-Habachi, Karl H. Schoenbach, Generation of intense excimer radiation from high-pressure hollow cathode discharges Applied Physics Letters. ,vol. 73, pp. 885- 887 ,(1998) , 10.1063/1.122027
M. Switkes, M. Rothschild, M. Salvermoser, Imaging of 1-nm-thick films with 193-nm microscopy. Optics Letters. ,vol. 26, pp. 1182- 1184 ,(2001) , 10.1364/OL.26.001182