Micro Polishing of Tungsten Carbide Using Magnetostrictive Vibrating Polisher
作者： Jiang Guo , Hirofumi Suzuki , Shinya MORITA , Yutaka Yamagata , Toshiro Higuchi
DOI: 10.4028/WWW.SCIENTIFIC.NET/KEM.516.569
关键词:
摘要: Micro structured glass lenses are highly required in new fields such as channels, Fresnel for solar panels and Wafer Level Cameras (WLC). The moulded bypress moulding with micro ceramics moulds made of tungsten carbides (WC). In this paper, a Vibration Assisted Polishing (VAP) method is proposed developed by using circular vibration the magnetostrictive vibrating polisher. polisher composed vibrator small polishing tool, tool mounted on head vibrator. concrete design assisted finite element (FEM) through mode analysis, 4th selected. It generates trace at frequency 9.2 kHz radius 30 μm. fixed 5-axis (X, Y, Z, B C) controlled system. Through some fundamental experiments, shapes removal function acquired surface roughness reduced to 9 nm Rz (1 Ra).
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