Ferroelectric film, method of manufacturing ferroelectric film, ferroelectric capacitor, and ferroelectric memory
作者： Yasuaki Hamada , Hiromu Miyazawa , Tomokazu Kobayashi , Takeshi Kijima
DOI:
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摘要: A ferroelectric film having a shown by general formula (Pb 1-d Bi d )(B 1-a X )O 3 , B including at least one of Zr and Ti, Nb Ta, “a” being in range “0.05≦a≦0.4”, “d” “0
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