The quartz crystal resonator as detector of electrical loading: an analysis of sensing mechanisms

作者: Y. Lee , D. Everhart , F. Josse

DOI: 10.1109/FREQ.1996.559929

关键词:

摘要: Quartz crystal resonators (QCR) are being investigated for the detection of electrical properties an adjacent medium. Recent studies have suggested that sensitivity can be improved by utilizing modified electrode configuration. In this study, analysis loading sensing mechanism and mass sensitively profile performed examples modified-electrode QCRs. The total electric field which interacts with load on surface is a superposition fringing due to asymmetric configuration electrodes associated acoustic vibration along unelectroded surface. However, latter neglected quartz substrate. Changes in QCR antiresonant frequency, measure loading, shown very similar changes electrostatic capacitance. This makes capacitance sensor. use piezoelectric resonator allows direct measurements effect. It also as conductivity increases effective area increases, hence profile.

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