Morphological features in aluminum nitride epilayers prepared by magnetron sputtering
作者： Sebastian Stach , Dinara Dallaeva , Ştefan Ţălu , Pavel Kaspar , Pavel Tománek
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Susan Walter, Thomas Herzog, Henning Heuer, Hagen Bartzsch, Daniel Gloess, Smart ultrasonic sensors systems: investigations on aluminum nitride thin films for the excitation of high frequency ultrasound Smart Sensors, Actuators, and MEMS V. ,vol. 8066, pp. 806607- ,(2011) , 10.1117/12.886852
KL Chopra, RC Kainthla, DK Pandya, AP Thakoor, Physics of Thin Films Journal of The Electrochemical Society. ,vol. 111, pp. 85C- ,(1964) , 10.1149/1.2426128
John C. Russ, Roger P. Woods, The Image Processing Handbook, 2nd Ed Journal of Computer Assisted Tomography. ,vol. 19, pp. 979- 981 ,(1995) , 10.1097/00004728-199511000-00026
Ventura Rodríguez Lugo, Efraín Rubio Rosas, Jenaro Varela Caselis, Superficies y vacío Recubrimientos anticorrosivos epoxi-sílice dopados con polianilina sobre acero al carbón. ,vol. 23, pp. 114- 118 ,(2010)