Applications of atomic layer deposition to nanofabrication and emerging nanodevices
作者： Hyungjun Kim , Han-Bo-Ram Lee , W.-J. Maeng
DOI: 10.1016/J.TSF.2008.09.007
关键词:
摘要: … compared to other thin film deposition techniques. Since the … The excellent step coverage of ALD has enabled the fabrication of … of ALD such as excellent conformality, precise thickness …
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