Oxygen atom density in microwave oxygen plasma
作者： Alenka Vesel , Miran Mozetic , Marianne Balat-Pichelin
DOI: 10.1016/J.VACUUM.2007.02.003
关键词:
摘要: … oxygen atoms in microwave plasma using a fiber-optics catalytic probe (FOCP). Plasma was created within a quartz tube with an outer diameter of 5 cm by a 2.45 GHz microwave …
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Iztok Šorli, Rudolf Ročak, Determination of atomic oxygen density with a nickel catalytic probe Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. ,vol. 18, pp. 338- 342 ,(2000) , 10.1116/1.582189
A Ricard, V Monna, Reactive molecular plasmas Plasma Sources Science and Technology. ,vol. 11, pp. 218- 221 ,(2002) , 10.1088/0963-0252/11/3A/322
C. Guyon, S. Cavadias, I. Mabille, M. Moscosa-Santillan, J. Amouroux, Recombination of oxygen atomic excited states produced by non-equilibrium RF plasma on different semiconductor materials: catalytic phenomena and modelling Catalysis Today. ,vol. 89, pp. 159- 167 ,(2004) , 10.1016/J.CATTOD.2003.11.022
A. Ricard, M. Gaillard, V. Monna, A. Vesel, M. Mozetic, Excited species in H2, N2, O2 microwave flowing discharges and post-discharges Surface & Coatings Technology. ,vol. 142, pp. 333- 336 ,(2001) , 10.1016/S0257-8972(01)01276-2
C. Guyon, S. Cavadias, J. Amouroux, Heat and mass transfer phenomenon from an oxygen plasma to a semiconductor surface Surface & Coatings Technology. ,vol. 142, pp. 959- 963 ,(2001) , 10.1016/S0257-8972(01)01125-2
J Jašík, P Macko, V Martišovitš, P Lukáč, P Veis, None, Time Resolved Actinometric Study of Pulsed RF Oxygen Discharge Czechoslovak Journal of Physics. ,vol. 54, pp. 661- 676 ,(2004) , 10.1023/B:CJOP.0000029694.21954.1D
A. Ricard, V. Monna, M. Mozetic, Production of O atoms in Ar-O2 and N2-O2 microwave flowing post-discharges Surface & Coatings Technology. ,vol. 174, pp. 905- 908 ,(2003) , 10.1016/S0257-8972(03)00405-5
S. Krongelb, M. W. P. Strandberg, Use of Paramagnetic‐Resonance Techniques in the Study of Atomic Oxygen Recombinations The Journal of Chemical Physics. ,vol. 31, pp. 1196- 1210 ,(1959) , 10.1063/1.1730570
F Hempel, PB Davies, D Loffhagen, L Mechold, J Röpcke, None, Diagnostic studies of H2?Ar?N2 microwave plasmas containing methane or methanol using tunable infrared diode laser absorption spectroscopy Plasma Sources Science and Technology. ,vol. 12, ,(2003) , 10.1088/0963-0252/12/4/025
M Balat-Pichelin, J.M Badie, R Berjoan, P Boubert, Recombination coefficient of atomic oxygen on ceramic materials under earth re-entry conditions by optical emission spectroscopy principles and practice of constraint programming. ,vol. 291, pp. 181- 194 ,(2003) , 10.1016/S0301-0104(03)00152-6