Influence of squeeze film damping on the higher-order modes of clamped–clamped microbeams
作者： Nouha Alcheikh , Lakshmoji Kosuru , Nizar Jaber , M Bellaredj , Mohammad I Younis
DOI: 10.1088/0960-1317/26/6/065014
关键词:
摘要: … a new material in MEMS fabrication can affect damping. This is especially important for MEMS polymers, … Thus, the total admittance spectrum of the resonator Y(ω) is expressed as [35] …
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