An adjustable shadow mask assembly for use in solar cell fabrications
作者： Moon Chun , Babak Adibi
DOI:
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摘要: An adjustable shadow mask implantation system comprising: an ion source configured to provide ions; and assembly selectively allow ions from the pass therethrough a substrate where they are implanted, wherein is adjust between first position second position, enables of multiple substantially parallel lines absent any with intersecting orientation respect when set in line position.
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