Method of manufacturing microlens array, method of manufacturing solid-state image sensor, and solid-state image sensor
作者： Masaki Kurihara
DOI:
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摘要: A method of manufacturing a microlens array includes forming resist film on structure including plurality light-receiving portions, exposing the using photomask in which lens patterns for microlenses are arranged, pattern by developing exposed film, and annealing pattern, wherein include having exposure light transmittance distributions different from each other.
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