Micromechanical "hollow-disk" ring resonators
作者： Sheng-Shian Li , Yu-Wei Lin , Yuan Xie , Zeying Ren , C.T.-C. Nguyen
DOI: 10.1109/MEMS.2004.1290711
关键词:
摘要: A vibrating polysilicon micromechanical" hollow-disk" ring resonator obtained by removing quadrants of material from a solid disk resonator, but purposely leaving intact beams of material to non-intrusively support the structure, has been demonstrated in several vibration modes spanning frequencies from HF (24.4 MHz), to VHF (72.1 MHz), to UHF (1.169 GHz), with Q's as high as 67,519, 48,048, and 5,846, respectively. Furthermore, the use of notched support attachments closer to actual extensional ring nodal points raises the Q to 14,603 at …
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