Beam irradiation apparatus
作者： Atsushi Yamaguchi , Yoshiaki Maeno
DOI:
关键词:
摘要: An attachment lens is arranged in a stage subsequent to scanning lens. After laser beam converged by the lens, converted into parallel When displaced direction perpendicular an optical axis of beam, traveling bent predetermined angle immediately after passes through Then, further same passage Accordingly, final swing outgoing from window increased imparted compared with case where not arranged. One surfaces formed toroidal surface, which allows have long outline vertical direction.
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