Normal Incidence Multilayer Mirrors for the Wavelength Range 2·3 to 4·6 nm

摘要: Abstract Near-normal incidence imaging optics for use at wavelengths λ in the range 2·3  4·6 nm may utilize in-phase reflections from a multilayer stack deposited on figured substrate. The reflectivity of such depends upon number N contributing interfaces and amplitude r each interface, where ∝ Δδ + iΔκ is determined by difference real imaginary parts refractive indices media defining interface. Thus be predominantly (class I) or Δκ II) combination both III). spectral variation has been computed formed a-C (or a-Si) with 54 different elements, which are thereby classified as I, II III. normal R versus representative multilayers class calculated function layer thickness ratio γ criteria established most suitable choice materials. influence metal lay...