A micro electromagnetic low level vibration energy harvester based on MEMS technology
作者： Peihong Wang , Katsuhiko Tanaka , Susumu Sugiyama , Xuhan Dai , Xiaolin Zhao
DOI: 10.1007/S00542-009-0827-0
关键词:
摘要: This paper presents a micro electromagnetic energy harvester which can convert low level vibration to electrical power. It mainly consists of an electroplated copper planar spring, permanent magnet and coil with high aspect ratio. Mechanical simulation shows that the natural frequency magnet-spring system is 94.5 Hz. The resonant amplitude 259.1 μm when input 14 μm at resonance. Electromagnetic linewidth turns influence induced voltage greatly. optimized generate 0.7 μW maximal output power peak–peak 42.6 mV in 94.5 Hz acceleration 4.94 m/s2 (this kind ambient vibration). A prototype (not optimized) has been fabricated using MEMS micromachining technology. testing results show (peak–peak) 18 mV 0.61 μW for 14.9 m/s2 external its 55 Hz not level).
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