Method of manufacturing nanostructures on a surface, on a mould and on an optical element, and an optical element as such manufactured

作者: Chin Patrick

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摘要: The present invention is directed to a method of manufacturing nanostructures on surface metal substrate, comprising forming said by means step, step including subsequently performing at least once the steps anodizing substrate second voltage for an oxidized layer pores; and etching modifying dimensions wherein prior comprises preparation enabling mix different sized during first selectively extending pores into underneath layer; removing layer.

参考文章(10)
Akinobu Isurugi, Akiyoshi Fujii, Hidekazu Hayashi, Kiyoshi Minoura, Mold and manufacturing method therefor ,(2010)
Seung-Yeol Han, Brian K. Paul, Chih-Hung Chang, Nanostructured anti-reflective coatings for substrates ,(2011)
Yung-Chiang Ting, Shyi-Long Shy, Pore size control of alumina membrane mask Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series. ,vol. 6283, ,(2006) , 10.1117/12.681837
Shoso Shingubara, Fabrication of Nanomaterials Using Porous Alumina Templates Journal of Nanoparticle Research. ,vol. 5, pp. 17- 30 ,(2003) , 10.1023/A:1024479827507
Lanying Yang, Qin Feng, Binghao Ng, Xiangang Luo, Minghui Hong, Hybrid Moth-Eye Structures for Enhanced Broadband Antireflection Characteristics Applied Physics Express. ,vol. 3, pp. 102602- ,(2010) , 10.1143/APEX.3.102602
A. Santos, L. Vojkuvka, J. Pallarés, J. Ferré-Borrull, L.F. Marsal, In situ electrochemical dissolution of the oxide barrier layer of porous anodic alumina fabricated by hard anodization Journal of Electroanalytical Chemistry. ,vol. 632, pp. 139- 142 ,(2009) , 10.1016/J.JELECHEM.2009.04.008
Kuan-Liang Lai, Min-Hsiung Hon, Ing-Chi Leu, Fabrication of ordered nanoporous anodic alumina prepatterned by mold-assisted chemical etching Nanoscale Research Letters. ,vol. 6, pp. 157- 157 ,(2011) , 10.1186/1556-276X-6-157
Kentarou Nomura, Yoshihiro Ishibe, Yasuhiro Matsuo, Kazumi Kimura, Method for manufacturing a nanostructure ,(2006)