The microstructure of sputter‐deposited coatings

作者: John A. Thornton

DOI: 10.1116/1.573628

关键词:

摘要: … coatings must often be deposited at substrate temperatures T that are low relative to the coating material melting point … thick (0.3 to 2 mm) evaporated coatings ofTi, Ni, W, zrO and Al20 3 …

参考文章(0)