Semiconductor integrated circuit including circuit for driving electrostatic actuator, micro-electro-mechanical systems, and driving method of electrostatic actuator
作者： Tamio Ikehashi , Hiroaki Yamazaki
DOI:
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摘要: A semiconductor integrated circuit comprises an electrostatic actuator, estimation circuit, a storage and bias circuit. The actuator has top electrode, bottom insulating film disposed between the electrode electrode. estimates amount of charge accumulated in actuator. stores result by changes, on basis stored drive voltage to
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