High force MEMS device
作者： Michael B. Cohn
DOI:
关键词:
摘要: Problems with the short lifetime of MEMS devices, low actuation forces, contaminant build-up on contacts, etc. are minimized by a device an improved cantilever design that enables high force while maintaining large gaps. The both allows for and fast switching minimizing damage to contacts. can be fabricated one or two substrates, which bonded together seal ring provide packaged device.
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