Induced changes on visible emission and conductive type in N-doped ZnO films by rapid thermal process

作者: Z. P. Shan , S. L. Gu , K. P. Wu , S. M. Zhu , K. Tang

DOI: 10.1116/1.3462031

关键词:

摘要: The erratic p-type conductivity in nitrogen-doped ZnO film is still under investigation and has been debated up to now. In this study, the authors have studied effect of rapid thermal process (RTP) on properties N-doped films grown by metal-organic chemical vapor deposition. Hall-effect measurements show that sample as RTP temperature lower than 350 °C while, increased 550 °C or higher, conduction-type changed be n-type. Correspondingly, obvious D G peaks, which are related graphite clusters, observed increase their intensity with temperature, indicating interstitial substitutional carbon atoms may migrate form clusters grain boundary during RTP. also found lead significant changes photoluminescence samples, enhanced visible emissions increased. Similar ratios over pea...

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