Temperature effects on structure and optical properties of radio‐frequency sputtered VO2

摘要: Vanadium dioxide undergoes a first‐order phase transformation near 67 °C. This is accompanied by significant changes in optical properties. The most pronounced occur between IR wavelengths of 2 and 12 μm; therefore, thin films this material appear very attractive for uses switching devices. By knowing the effects that deposition temperature has on properties relating these to film microstructure, process fabricating with optimal desired microstructure can be developed. oxide were deposited sapphire substrates rf magnetron sputtering. At temperatures 350 °C, polycrystalline observed. X‐ray diffraction analysis indicated VO2 V4O7 phases present, characterization showed contrast transmission <20% switched unswitched states. As was increased, dendritic growth Film composit...