Cr-inserted TiO2 thin films for chemical gas sensors
作者： Ivano Alessandri , Elisabetta Comini , Elza Bontempi , Guido Faglia , Laura E. Depero
DOI: 10.1016/J.SNB.2007.06.020
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摘要: Abstract Cr–Ti oxide thin films were prepared by rf sputtering of Cr-inserted Ti targets. The roles played Cr content and thermal treatments on both the structure electrical conductivity investigated. Selected series samples tested as sensors for different gases like carbon monoxide ethanol. In cases, exhibiting best sensing performances determined possible correlations between properties evidenced.
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